Not at the super small geographies but at the CMA, CD and CSD which are Census Metropolitan Areas, Cities, and Municipalities. The years are historical 1665-1871, 1986, 1991, 1996, 2001, and 2006.
It is worth looking at how much is there!
Below are the data variables available for 1996 and I am sure 2001 and 2006 are just as rich. You can download in multiple formats.